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为了探究不同PS-PVD工艺条件对MoSi2涂层性能的影响，使用离心式喷雾干燥机、二流体喷雾干燥机制备了两种MoSi2粉末，并采用等离子喷涂-物理气相沉积(PS-PVD)的方法在TZM钼合金表面制备不同工艺的MoSi2涂层。通过扫描电子显微镜与X射线衍射仪对涂层的截面形貌、元素分布、相组成及相对含量进行了分析，探究了工艺参数与粉末种类对涂层厚度、硬度、物相、显微组织的影响，并测试了涂层在1 600℃的抗氧化性能，并对其氧化后的产物进行了表征分析。结果表明，在钼合金表面使用PS-PVD的方法制备的涂层为“致密柱状晶”结构；粒子沉积状态为气-液相混合共沉积；主要产物含有四方相MoSi2(t-MoSi2)、四方相Mo_5Si3(t-Mo_5Si3)、六方相MoSi2(h-MoSi2)以及立方相Si(c-Si)；原始粉末状态、喷涂距离对MoSi2的沉积状态与物相组成具有较大的影响，继而造成涂层的硬度与沉积效率的变化。PS-PVD制备的Mo-Si涂层在氧化后分为四层：表层Si O2层、Mo-Si-O混合层，Si渗入层、SiO2反应层，涂层的氧化失效最先发生在SiO2反应层。
Abstract：To investigate the effects of different PS-PVD process conditions on the properties of MoSi2 coatings.Two types of MoSi2 powders were prepared using a centrifugal spray dryer and a two-fluid spray dryer. MoSi2 coatings with varying process conditions were deposited on TZM alloy surfaces via plasma spray-physical vapor deposition(PS-PVD). The cross-sectional morphology,elemental distribution,phase composition,and relative content of the coatings were analyzed using scanning electron microscopy and X-ray diffraction. The effects of process parameters and powder types on coating thickness,hardness,physical phases,and microstructure were investigated. The oxidation resistance of the coatings at 1 600 ℃ was tested,and the oxidation products were characterized and analyzed.The PS-PVD-deposited coating on the molybdenum alloy surface exhibited a “dense columnar crystal” structure. Particle deposition occurred via gas-liquid co-deposition,with primary products comprising tetragonal MoSi2(t-MoSi2),tetragonal Mo5 Si3(t-Mo5 Si3),hexagonal MoSi2(h-MoSi2),and cubic Si(c-Si). The original powder state and sputtering distance significantly influenced the deposition state and phase composition of MoSi2,consequently affecting the coating hardness and deposition efficiency. The PS-PVD-prepared Mo-Si coating exhibited four layers after oxidation:a surface SiO2 layer,a Mo-Si-O mixed layer,a Si diffusion layer,and a SiO2 reaction layer. Oxidation failure of the coating first occurred in the SiO2 reaction layer.
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基本信息:
DOI：10.20240/j.rptjs.2025.04.010
中图分类号:TG174.4
引用信息:
[1]田昊阅,王珊,何浩然,等.钼合金表面PS-PVD制备Mo-Si涂层及其性能研究[J].热喷涂技术,2025,17(04):118-125.DOI:10.20240/j.rptjs.2025.04.010.
基金信息:
中国机械工业集团有限公司科研专项项目（ZDZX2024-13）
2025-12-25
2025-12-25